We have observed the velocity distribution of ionic species in the plu
me by a mass spectrometer during laser ablation of Y1Ba2Cu3Ox target.
The velocity distribution of Cu+ ions is strongly influenced by ambien
t oxygen pressure. As an oxygen pressure is raised, the velocity distr
ibution of Cu+ ions becomes narrows up to 2x10(-2) Torr, and then beco
mes broad again at higher pressures. This change in the velocity distr
ibution reflects the conversion of the supersonic expansion into the t
hermal equilibrium flow of the ejected species in the plume. The surfa
ce morphology of films is crucially dependent on the velocity distribu
tions.