X-RAY-DIFFRACTION ANALYSIS OF YBCO THIN-FILMS SYNTHESIZED BY AEROSOL MOCVD

Three typical YBa2Cu3O7-x thin films deposited on SrTiO3 substrates ha ve been prepared by aerosol MOCVD. Film microstructures have been inve stigated by X-ray diffraction. Pole-figures, phi-, omega- and theta-2 theta scans show highly developed c-axis texture. A proportion of each film consists of a-axis oriented crystallites embedded in the matrix. Analysis of the results reveals strong correlations between the film thickness and the degree of alignment of the c-axis of the grains. The evolution of the size of the coherence length along the normal to the film surface and some characteristics of crystal elastic distortions also depend on the thickness.