Deep acceptor impurities in high-purity, unintentionally p-type doped
GaAs epilayers grown by molecular beam epitaxy have been investigated
by variable temperature Hall effect measurements. The experimental res
ults were analyzed in detail by using the grand partition function for
malism assuming multiple acceptor levels with both single and double o
ccupancy. It is shown that p-type conduction is originated from the pr
esence of a residual shallow acceptor and several deep acceptor levels
. For the samples having relatively high concentration of shallow acce
pters, deep aeceptor states with the ionization energies of about 90 a
nd 200 meV are determined, which are likely associated with the presen
ce of double acceptor centers. In the high purity samples, however, de
eper aceeptor levels are required to account for the data.