ATOMICALLY REGULATED LAYER-BY-LAYER GROWTH OF SRTIO3 ON A-AXIS ORIENTED YBA2CU3O7-DELTA THIN-FILMS
Citation
H. Koinuma et al., ATOMICALLY REGULATED LAYER-BY-LAYER GROWTH OF SRTIO3 ON A-AXIS ORIENTED YBA2CU3O7-DELTA THIN-FILMS, Physica. C, Superconductivity, 235, 1994, pp. 731-732
Categorie Soggetti
Physics, Applied
SICI code
0921-4534(1994)235:<731:ARLGOS>2.0.ZU;2-D
Abstract
The intensity oscillation of reflection high energy electron diffracti
on (RHEED) was observed during the pulsed laser deposition of ultra-th
in SrTiO3 films on a-axis oriented YBa2Cu3O7-delta (YBCO) thin films.
This enabled us to control digitally the overlayer thickness on an ato
mic scale. In the same deposition chamber, we could fabricate high qua
lity epitaxial YBCO thin films on SrTiO3 with Tc exceeding 80K and 90K
for a-and c-axis oriented films, respectively. Reducing the particle
density below 10(5)cm(-2) on the bottom YBCO films should be promising
to construct Josephson tunnel junctions.