EFFECT OF INTERFACIAL-ROUGHNESS REPLICATION ON THE DIFFUSE-X-RAY REFLECTION FROM PERIODICAL MULTILAYERS

Authors
HOLY V KUBENA J VANDENHOOGENHOF WW VAVRA I
Citation
V. Holy et al., EFFECT OF INTERFACIAL-ROUGHNESS REPLICATION ON THE DIFFUSE-X-RAY REFLECTION FROM PERIODICAL MULTILAYERS, Applied physics A: Materials science & processing, 60(1), 1995, pp. 93-96
Citations number
15
Categorie Soggetti
Physics, Applied
Journal title
Applied physics A: Materials science & processing → ACNP
ISSN journal
09478396
Volume
60
Issue
1
Year of publication
1995
Pages
93 - 96
Database
ISI
SICI code
0947-8396(1995)60:1<93:EOIROT>2.0.ZU;2-J
Abstract
The correlation of roughness profiles of different interfaces in a per iodical multilayer affects the reciprocal-space distribution of the di ffusely reflected X-ray intensity. This distribution has been calculat ed by means of the Distorted-Wave Born Approximation (DWBA) method and compared with the results of X-ray reflectometry on periodical metall ic multilayers, It has been shown that the measurement of the reciproc al-space distribution of diffusely scattered intensity is a suitable n on-destructive method to investigate the roughness replication in mult ilayers.