Scanning tunneling microscopy (STM) was employed to study the surface
of c-axis oriented YBCO thin films. The films with a thickness of typi
cally about 300 nm were grown onto single crystal (100) MgO by pulsed
laser deposition. In addition to the well known growth spirals, ''froz
en in'' clusters were observed. The latter result in a high density of
holes with sizes ranging from a few to about 50 nm. These holes may s
erve as pinning sites. Sub-unit cell steps were found in regions betwe
en neighboring growth spirals. In samples exposed to air for several w
eeks, a change in surface morphology was found. Samples that were patt
erned by wet-chemical etching did not show the characteristic growth s
teps. Irradiation with fast neutrons slightly increased the density of
nm sized holes.