Proton-exchange (PE) technology has been used to form planar optical w
aveguides in LiNbO3 and LiTaO3 single crystals. Studying post-exchange
annealed (APE) waveguides, the evolution of guide properties with dec
reasing the proton concentration is followed. Raman spectroscopy is us
ed to investigate the vibrational characteristics of PE and APE layers
. The spectra of PE layers show a high degree of disorder and a ''para
electric-like'' form.