HYDROGEN ON SI - UBIQUITOUS SURFACE TERMINATION AFTER WET-CHEMICAL PROCESSING

Authors
PIETSCH GJ
Citation
Gj. Pietsch, HYDROGEN ON SI - UBIQUITOUS SURFACE TERMINATION AFTER WET-CHEMICAL PROCESSING, Applied physics A: Materials science & processing, 60(4), 1995, pp. 347-363
Citations number
109
Categorie Soggetti
Physics, Applied
Journal title
Applied physics A: Materials science & processing → ACNP
ISSN journal
09478396
Volume
60
Issue
4
Year of publication
1995
Pages
347 - 363
Database
ISI
SICI code
0947-8396(1995)60:4<347:HOS-US>2.0.ZU;2-#