THE INVESTIGATION OF DEVICE STRUCTURES ON POROUS SI BY SEM EBIC TECHNIQUE

Authors
BALAGUROV LA KATZ EA LUKYANOV AE BUTYLKINA NA PETROVA EA GOVORKOV AV
Citation
La. Balagurov et al., THE INVESTIGATION OF DEVICE STRUCTURES ON POROUS SI BY SEM EBIC TECHNIQUE, Izvestia Akademii nauk SSSR. Seria fiziceskaa, 59(2), 1995, pp. 8-13
Citations number
16
Categorie Soggetti
Physics
Journal title
Izvestia Akademii nauk SSSR. Seria fiziceskaa → ACNP
ISSN journal
03676765
Volume
59
Issue
2
Year of publication
1995
Pages
8 - 13
Database
ISI
SICI code
0367-6765(1995)59:2<8:TIODSO>2.0.ZU;2-J