THE STRUCTURE AND COMPOSITION INVESTIGATI ON OF THICK LAYERS OF SILICON-CARBIDE DEPOSITED FROM GAS-PHASE

Authors
BATOV DV IVANOV LS PEGOV VS PETROV VI STEPOVITCH MA
Citation
Dv. Batov et al., THE STRUCTURE AND COMPOSITION INVESTIGATI ON OF THICK LAYERS OF SILICON-CARBIDE DEPOSITED FROM GAS-PHASE, Izvestia Akademii nauk SSSR. Seria fiziceskaa, 59(2), 1995, pp. 35-37
Citations number
3
Categorie Soggetti
Physics
Journal title
Izvestia Akademii nauk SSSR. Seria fiziceskaa → ACNP
ISSN journal
03676765
Volume
59
Issue
2
Year of publication
1995
Pages
35 - 37
Database
ISI
SICI code
0367-6765(1995)59:2<35:TSACIO>2.0.ZU;2-C