THE PRINCIPLES OF DESIGN AND OPTIMIZATION OF ELECTRON-OPTICAL SYSTEMSOF LOW-VOLTAGE SEM

Authors
BALASHOV VN SUVORINOV AV SHAKHBAZOV SY
Citation
Vn. Balashov et al., THE PRINCIPLES OF DESIGN AND OPTIMIZATION OF ELECTRON-OPTICAL SYSTEMSOF LOW-VOLTAGE SEM, Izvestia Akademii nauk SSSR. Seria fiziceskaa, 59(2), 1995, pp. 60-63
Citations number
3
Categorie Soggetti
Physics
Journal title
Izvestia Akademii nauk SSSR. Seria fiziceskaa → ACNP
ISSN journal
03676765
Volume
59
Issue
2
Year of publication
1995
Pages
60 - 63
Database
ISI
SICI code
0367-6765(1995)59:2<60:TPODAO>2.0.ZU;2-8