Post-growth in-situ XPS spectra of c-axis oriented YBCO thin films dep
osited by hollow cathode discharge sputtering on (100) MgO and (001) Y
SZ buffered r-plane sapphire have been measured. The XPS data have bee
n quantitatively analyzed and show evidence of a BaO/CuO2/Y/CuO2/BaO/C
uO/BaO layer sequence on the surface of the films grown on MgO substra
tes. The behavior of the XPS spectra of Ba in the case of YBCO on YSZ/
sapphire is qualitatively different from that of YBCO on MgO.