MOLECULAR DESIGN OF DISSOLUTION INHIBITOR IN CHEMICAL AMPLIFICATION RESIST SYSTEM BY MOLECULAR-ORBITAL METHOD - TRANSPARENCY AND REACTIVITIES WITH PROTONS
H. Nobutoki et al., MOLECULAR DESIGN OF DISSOLUTION INHIBITOR IN CHEMICAL AMPLIFICATION RESIST SYSTEM BY MOLECULAR-ORBITAL METHOD - TRANSPARENCY AND REACTIVITIES WITH PROTONS, JPN J A P 1, 34(2A), 1995, pp. 623-629
The molecular orbital(MO) method has been applied to study the transpa
rency of any dissolution inhibitors in the deep-UV region and the reac
tivities of those molecules with protons derived from a photoacid gene
rator in a chemical amplification resist system for excimer laser lith
ography. The results indicate that 1,3-bis(tert-butoxycarbonyloxy) ben
zene is the best dissolution inhibitor with respect to both the transp
arency and the reactivities among the five dissolution inhibitors stud
ied, because it has small absorption peaks in the wavelength range lon
ger than 215 nm and easily decomposes into the oxycarbonyloxyl compoun
d and the tert-butyl group upon proton attack, The validity of the MO
approach is confirmed by the experimental results.