FABRICATION AND PERFORMANCE OF MULTILAYER COATED LAMINAR PHASE GRATING IN THE SOFT-X-RAY REGION

Authors
YUAN LX FAN ZX FU SJ CUI MQ
Citation
Lx. Yuan et al., FABRICATION AND PERFORMANCE OF MULTILAYER COATED LAMINAR PHASE GRATING IN THE SOFT-X-RAY REGION, Physica scripta. T, 51(6), 1995, pp. 680-682
Citations number
10
Categorie Soggetti
Physics
Journal title
Physica scripta. T → ACNP
ISSN journal
02811847
Volume
51
Issue
6
Year of publication
1995
Pages
680 - 682
Database
ISI
SICI code
0281-1847(1995)51:6<680:FAPOMC>2.0.ZU;2-A
Abstract
The fabrication and characterization of soft X-ray multilayer laminar phase gratings are described in this paper. The measurement of the opt ical performance of soft X-ray multilayer phase gratings at the Beijin g Synchrotron Radiation Facility is described in detail. The measureme nt results are analyzed and compared with theoretical predictions.