NEW APPLICATION OF CLASSICAL X-RAY-DIFFRACTION METHODS FOR EPITAXIAL FILM CHARACTERIZATION

The quality of an epilayer is characterized by its in-plane misfit and orientation with respect to the substrate, its out-of-plane cell para meter, its orientation distribution and its in-plane and out-of-plane strains. We adapted the Weissenberg equi-inclination geometry such tha t combined with a powder diffractometer it provides all the informatio n mentioned, in two single scans. The powder diffractometer data are u sed to determine the out-of-plane texture of the film, while the photo graphic Weissenberg film provides a complete overview of the in-plane characteristics. The method can be performed with standard laboratory equipment in a simple and reliable way. The method is illustrated with four different epilayer/substrate systems.