An atomic force microscope (AFM) was used to study the growth mechanis
m of ultrathin YBa2Cu3O7 (YBCO) films with thicknesses of 2.5 nm, 7.5
nm, 12.5 nm and 25 nm. The YBCO films were grown on SrTiO3 (100) cryst
al substrates with and without a 40 nm thick buffer layer of PrBa2Cu3O
7 (PBCO) respectively. The AFM data indicated that the films grew with
spiral and layer by layer growth modes, with screw dislocations being
the typical spiral growth modes. Three kinds of screw dislocation wer
e found on the 7.5 nm thick films with buffer layer. Two of them showe
d constant terrace heights, which were 0.6 nm and 1.1 nm respectively,
and the third kind of screw dislocation showed a combination of three
different terrace heights of 1.6 nm, 1.0 nm and 0.6 nm. All of the sc
rew dislocations had a common feature: the top of the screw dislocatio
n had a columnar core and the height was four times greater than the l
ength of the unit cell along the c-axis. Moreover, the heights of the
terraces in all three kinds of screw dislocation were 0.6 nm or multip
les of this value. This is approximately half the c-axis lattice param
eter of YBCO, suggesting a two-dimensional growth mode along the film
plane.