REINVESTIGATION OF THE FIRST NUCLEATED PHASE IN NB SI MULTILAYERS/

Authors
ZHANG M YU W WANG WH WANG WK
Citation
M. Zhang et al., REINVESTIGATION OF THE FIRST NUCLEATED PHASE IN NB SI MULTILAYERS/, Thin solid films, 289(1-2), 1996, pp. 180-183
Citations number
17
Categorie Soggetti
Physics, Applied","Material Science","Physics, Condensed Matter
Journal title
Thin solid films → ACNP
ISSN journal
00406090
Volume
289
Issue
1-2
Year of publication
1996
Pages
180 - 183
Database
ISI
SICI code
0040-6090(1996)289:1-2<180:ROTFNP>2.0.ZU;2-Y
Abstract
The first nucleated phase in compositionally modulated Nb/Si multilaye rs was identified using transmission electron microscopy (TEM) and X-r ay diffraction (XRD). A cubic Nb3Si phase was found to be formed when the Nb/Si multilayers were deposited at 200 degrees C and 300 degrees C. The formation of the crystalline silicide at such low temperatures is explained on the basis of theories of the effective heat of formati on and classical nucleation.