We have confirmed that a self-assembled monolayer (SAM) film of octade
canethiol (ODT), CH3(CH2)(17)SH, can be formed on a cleaved GaAs (110)
surface, by using an atomic force microscope (AFM) and X-ray photoele
ctron spectroscopy (XPS). Circular depressions were observed on the su
rface after film formation. The area of the circular depressions incre
ased with immersion time, indicating that the solution oxidized the in
terface between ODT molecules and the GaAs surface, resulting in remov
al of ODT molecules. The oxidation was considerably faster in pure eth
anol solution than that in ODT solution, demonstrating that the SAM fi
lm protects the GaAs surface from-oxidation. High-resolution lateral f
orce microscope (LFM) images revealed a periodic structure that had tw
o types of lines: periodic lines 0.57 nm apart and lines rotated 55 de
grees with respect to them. A structural model of the SAM successfully
explained both the features in high-resolution LFM images and the dep
ression depth observed in AFM images.