Xy. Li et al., THE EFFECT OF YBA2CU3O7-X TARGET PROPERTIES ON THE SUPERCONDUCTING CHARACTERISTICS OF LASER-ABLATION DEPOSITED THIN-FILMS, Physica. C, Superconductivity, 248(3-4), 1995, pp. 281-289
Pulsed-laser deposition has been demonstrated to be an advantageous te
chnique for producing high-quality superconducting YBCO thin films. In
this technique, the quality of the YBCO thin films is strongly depend
ent on various processing conditions such as substrate temperature, la
ser energy density, ambient oxygen pressure, and pulse repetition rate
, all of which have been previously investigated. However, it has been
also found that the laser target is one of the key factors in the fab
rication of high-quality YBa2Cu3O7-x (YBCO) thin films. In the systema
tic identification of this effect, nine different YBCO targets have be
en studied. Both the YBCO targets from various sources and the corresp
onding YBCO thin films deposited under optimized conditions have been
characterized and compared by their structure, composition and electro
nic properties. This investigation has indicated that impurity phases
(liquid phase, 211 and CuO) in the targets play different roles, thoug
h the sintered targets as a whole were stoichiometric. The superconduc
ting transition temperature (T-c) of YBCO thin films decreased as the
liquid phase (BaCuO2-CuO, which is yttrium deficient) in the YBCO bulk
target increased. T-c of the thin films may also decrease with the pr
esence of the 211 phase in the targets, however, the CuO phase in the
YBCO target may actually increase T-c of the thin films.