FABRICATION OF BORON-CARBIDE BORON HETEROJUNCTION DEVICES/

Citation
Sd. Hwang et al., FABRICATION OF BORON-CARBIDE BORON HETEROJUNCTION DEVICES/, Applied physics letters, 68(11), 1996, pp. 1495-1497
Citations number
11
Categorie Soggetti
Physics, Applied
Journal title
ISSN journal
00036951
Volume
68
Issue
11
Year of publication
1996
Pages
1495 - 1497
Database
ISI
SICI code
0003-6951(1996)68:11<1495:FOBBHD>2.0.ZU;2-X
Abstract
We have succeeded in the fabrication of a boron-carbide/boron diode on an aluminum substrate, and a boron-carbide/boron junction field effec t transistor. Our results suggest that with respect to the approximate ly 2 eV band gap pure boron material, 0.9 eV band gap boron-carbide (B 5C) acts as a p-type material. Both boron and boron-carbide (B5C) thin films were fabricated from single source borane cage molecules using plasma enhanced chemical vapor deposition (PECVD). Epitaxial growth do es not appear to be a requirement. (C) 1996 American Institute of Phys ics.