HEATING MODE TRANSITION INDUCED BY A MAGNETIC-FIELD IN A CAPACITIVE RF DISCHARGE

Authors
TURNER MM HUTCHINSON DAW DOYLE RA HOPKINS MB
Citation
Mm. Turner et al., HEATING MODE TRANSITION INDUCED BY A MAGNETIC-FIELD IN A CAPACITIVE RF DISCHARGE, Physical review letters, 76(12), 1996, pp. 2069-2072
Citations number
16
Categorie Soggetti
Physics
Journal title
Physical review letters → ACNP
ISSN journal
00319007
Volume
76
Issue
12
Year of publication
1996
Pages
2069 - 2072
Database
ISI
SICI code
0031-9007(1996)76:12<2069:HMTIBA>2.0.ZU;2-R
Abstract
We show that a recently proposed pressure model of collisionless heati ng in capacitive rf discharges predicts that a small magnetic field (s imilar to 10 G) applied transverse to the electric field will induce a heating mode transition from a pressure-heating dominated state to an Ohmic-heating dominated state. This prediction is confirmed by kineti c simulations and experiments.