PLANAR AND CHANNEL WAVE-GUIDE FABRICATION IN LIB3O5 USING MEV HE-IMPLANTATION( ION)

Multiple energy He+ ion implantation to increase the width of the impl antation-induced refraction index barrier in LiB3O5 (LBO) is reported. Improvements in planar waveguide transmission (coupling and propagati on) at the HeNe laser wavelength of 633 nm, from 5% to 45% for TE pola rized light, and from 10% to 28% for TM polarized light in a similar t o 5-mm-long LBO planar waveguide are shown. Annealing is found to incr ease the transmission (coupling and propagation) at the wavelength of 633 nm of multiple-energy implanted planar LBO waveguides by as much a s 24% for TE polarized light and 71% for TM polarized light. Channel w aveguides in LBO fabricated by multiple-energy ion implantation throug h a gold wire mask and their use for second-harmonic generation are re ported. (C) 1996 American Institute of Physics.