Molecular beam epitaxy of Cu on Cu(111) was studied using thermal ener
gy He scattering, in the temperature range between 100 and 450 K. Thre
e-dimensional growth was observed in the whole temperature range. To d
etermine the onset of various diffusion processes, submonolayer films
formed by deposition at low temperature were annealed. Annealing proce
eds in two steps. The first step is interpreted as a change in island
shape, the second as Ostwald-ripening. A comparison with homoepitaxy o
n Pt(111) and Ag(111) is made. Growth manipulation was carried out by
artificially increasing the island number density via intervention in
the nucleation stage of each layer. The procedures applied were temper
ature reduction during nucleation as well as pulsed ion bombardment. T
hese techniques enabled the convenient growth of good quality films co
nsisting of a large number of monolayers. Finally, the use of oxygen a
s a surfactant modifying the growth mode was investigated. Under some
growth conditions, pre-exposure of the surface to oxygen was found to
induce weak He-intensity oscillations during deposition. The quality o
f the films grown in this way was, however, low.