INVESTIGATION ON THE FORMATION OF RUO2 FILM ELECTRODE BY SECONDARY-ION MASS-SPECTROMETRY

The formation of thermally prepared RuO2 him electrode from hydrated R uCl3 precursor on titanium and nickel supports was followed as a funct ion of the calcination temperature by Secondary Ion Mass Spectrometry (SIMS). The identification of metal, metal oxide and cluster ions as w ell as organic fragments can contribute substantially to the understan ding of the process of him evolution. Concentration depth profiles for some selected species showed that the support material can strongly i nfluence the structure of the coating. Diffusion profiles of the noble metal showed significant differences for different support materials. The results are in agreement with - and complementary to - those of p revious thermoanalytical investigations.