We report a novel mechanism, internal (lll) faceting, of strain relief
at heterointerfaces with square symmetry. The mechanism has been reve
aled for thin Cu films on Ni(100) by scanning tunneling microscopy. In
the first monolayer monatomic chains of Cu atoms are shifting lateral
ly by 1/root 8 lattice constant along [110] and thereby protrude from
the surface layer. With each Cu layer added, the protrusion stripes gr
ow in width by one atom, forming internal {111} facets in the Cu film.
This picture is in marked contrast to the widely accepted continuum t
heory of epitaxial growth, which predicts a pseudomorphic him growth u
p to a critical thickness of 8 monolayers.