AN 18-CM-DIAM INTENSE BEAM CURRENT BROAD-BEAM ION-SOURCE FOR SURFACE MODIFICATIONS

Authors
FENG YC LI XG
Citation
Yc. Feng et Xg. Li, AN 18-CM-DIAM INTENSE BEAM CURRENT BROAD-BEAM ION-SOURCE FOR SURFACE MODIFICATIONS, Review of scientific instruments, 67(3), 1996, pp. 1217-1217
Citations number
NO
Categorie Soggetti
Physics, Applied","Instument & Instrumentation
Journal title
Review of scientific instruments → ACNP
ISSN journal
00346748
Volume
67
Issue
3
Year of publication
1996
Part
2
Pages
1217 - 1217
Database
ISI
SICI code
0034-6748(1996)67:3<1217:A1IBCB>2.0.ZU;2-C