HOT AND WARM ELECTRON-ENERGY DISTRIBUTION AT DIFFERENT ELECTRON-CYCLOTRON-RESONANCE ION-SOURCE OPERATION REGIMES

High charge states of heavy ions inside the electron cyclotron resonan ce plasma are produced by hot and warm electrons with energies above 3 keV. The slope of the electron energy distribution function and the d ensity of these populations were obtained from bremsstrahlung spectra emitted by the 7.5 GHz Electron Cyclotron Resonance Ion Source of the Forschungszentrum Rossendorf measured with a HP Ge solid state detecto r. For this a new deconvolution method has been used. The operating co ndition of the ion source influences the behavior of the electrons. Mi xing in of light gases to the discharge strongly increases the electro n density. (C) 1996 American Institute of Physics.