A SIDE EXTRACTION PIG NEGATIVE-ION SOURCE WITH A PERMANENT-MAGNET

A side extraction PIG ion source with a permanent magnet is introduced , which can be used not only for producing miliampere positive ion bea ms, but also for direct extraction of negative ions of some elements w ith larger electron affinity. So far H, O, and F negative ions have be en extracted from the source. At -15 kV extraction voltage, O- ion bea ms of 130 mu A and a F- ion beam of 75 mu A are extracted, and the dis charge power consumption is 110 and 280 W, respectively. (C) 1996 Amer ican Institute of Physics.