USE OF THE PEAK-TO-BACKGROUND RATIO FOR QUANTITATIVE AUGER ANALYSIS OF SEMIINSULATING POLYCRYSTALLINE SILICON LAYERS

Authors
LIDAY J TOMEK S VOGRINCIC P MRAZIK P BREZA J
Citation
J. Liday et al., USE OF THE PEAK-TO-BACKGROUND RATIO FOR QUANTITATIVE AUGER ANALYSIS OF SEMIINSULATING POLYCRYSTALLINE SILICON LAYERS, Surface and interface analysis, 24(3), 1996, pp. 198-203
Citations number
31
Categorie Soggetti
Chemistry Physical
Journal title
Surface and interface analysis → ACNP
ISSN journal
01422421
Volume
24
Issue
3
Year of publication
1996
Pages
198 - 203
Database
ISI
SICI code
0142-2421(1996)24:3<198:UOTPRF>2.0.ZU;2-N
Abstract
The work presents the results of quantitative evaluation of Auger elec tron spectra utilizing the heights of Auger peaks normalized with resp ect to the background in N(E) vs. E distribution curves. The quantific ation method used was verified on a series of semi-insulating polycrys talline silicon samples with a variable content of oxygen. The results obtained were compared with those yielded by other procedures of quan titative AES, and by secondary neutral mass spectrometry.