Sk. Kim et al., COMPOSITIONAL DISORDERING OF AL0.3GA0.7AS GAAS SUPERLATTICES BY SOLID-PHASE REGROWTH/, Physica status solidi. a, Applied research, 153(2), 1996, pp. 409-414
A solid phase regrowth method is used to investigate the compositional
disordering of Al0.3Ga0.7As/GaAs superlattices grown by molecular bea
m epitaxy. All of the metal-evaporated and annealed samples exhibit di
sordering, and the magnitude of the disordering for a Al0.3Ga0.7As/GaA
s superlattice increases as the number of interfaces increases. The re
sults of the secondary ion mass spectroscopy show clearly an interdiff
usion of the AlGaAs and GaAs layers, and a compositional disordering m
echanism in Al0.3Ga0.7As/GaAs superlattices is presented.