PECULIARITIES OF NUCLEATION OF PBOX THIN-FILMS DURING ION-BEAM REACTIVE SPUTTERING

Authors
SVIRIDOV EV XIAO DQ PENG WB SHI Z ZHU JG
Citation
Ev. Sviridov et al., PECULIARITIES OF NUCLEATION OF PBOX THIN-FILMS DURING ION-BEAM REACTIVE SPUTTERING, Physica status solidi. a, Applied research, 153(2), 1996, pp. 1-4
Citations number
12
Categorie Soggetti
Physics, Condensed Matter
Journal title
Physica status solidi. a, Applied research → ACNP
ISSN journal
00318965
Volume
153
Issue
2
Year of publication
1996
Pages
1 - 4
Database
ISI
SICI code
0031-8965(1996)153:2<1:PONOPT>2.0.ZU;2-0