MICROCONTACT PRINTING OF ALKANETHIOLS ON COPPER AND ITS APPLICATION IN MICROFABRICATION

Authors
XIA YN KIM E MRKSICH M WHITESIDES GM
Citation
Yn. Xia et al., MICROCONTACT PRINTING OF ALKANETHIOLS ON COPPER AND ITS APPLICATION IN MICROFABRICATION, Chemistry of materials, 8(3), 1996, pp. 601
Citations number
19
Categorie Soggetti
Chemistry Physical","Material Science
Journal title
Chemistry of materials → ACNP
ISSN journal
08974756
Volume
8
Issue
3
Year of publication
1996
Database
ISI
SICI code
0897-4756(1996)8:3<601:MPOAOC>2.0.ZU;2-#
Abstract
Microcontact printing was used to generate patterned self-assembled mo nolayers of alkanethiolates on the surfaces of evaporated films of cop per. These patterned SAMs could be directly used as ultrathin resists that protected the underlying copper from etching in aqueous solutions of FeCl3/ HCl or FeCl3/NH4Cl. Arrays of junctions of Ag/Ag2O/Cu were fabricated using a multistep procedure that combines metal evaporation , microcontact printing, and selective etching.