A. Oberstedt et al., SILICON MICROCALORIMETERS FOR HIGH-ENERGY RESOLUTION SPECTROSCOPY, Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 370(1), 1996, pp. 206-207
Integrated bolometers of a volume of about 0.05 mm(3) are fabricated b
y the technique of silicon micromachining. As thermistor serves a heav
ily phosphorus doped area implanted in the absorber surface. The optim
um thermistor doping was determined with respect to a high resistance
gradient, but at the same time with resistance values low enough for p
roviding signals which are reasonably high. Measurements of low-energe
tic gamma-rays and conversion electrons indicated the high sensitivity
of our detectors, however unfortunately for picking up noise, too. Th
e steps to improve the current energy resolution are reported.