A. Alessandrello et al., DEVELOPMENT OF SI MICROCALORIMETERS FOR A NEUTRINO MASS EXPERIMENT, Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 370(1), 1996, pp. 244-246
We are developing high resolution Si-implanted thermistors for a calor
imetric neutrino mass experiment. The production process is being tune
d to reach high performance and reproducibility. We discuss the proper
ties of devices prepared with different process parameters and differe
nt geometries. We also present the results obtained using these thermi
stors for detecting low energy X-rays.