SURFACE-MORPHOLOGY OF POLYCRYSTALLINE DIAMOND FILMS ETCHED BY AR+ BEAM BOMBARDMENT

Polycrystalline diamond films etched by Ar+ beam bombardment were inve stigated by scanning electron microscopy and Raman spectroscopy. In an ion sputtering apparatus, an etching rate of 14 mu m C-1 was obtained when 10 kV-accelerated Ar+ ions penetrated with an angle of 15-30 deg rees from the normal. A number of cavities were created on the surface treated at low incidence angle. In contrast, micro-prominence was see n under the condition of high incidence angle. The degree of surface r oughness on etched films was also changed with the incidence angle of the beam. A relatively smooth surface appeared after the treatment wit h an incidence angle of greater than or equal to 15 degrees. Raman spe ctroscopy revealed that the physical etching of diamond is effective i n obtaining high quality surface of polycrystalline diamond films.