We have observed vibrationally excited sulfur hexafluoride molecules i
n direct inelastic scattering from hoc graphite surfaces. The vibratio
nal temperature for the scattered flux has been determined by probing
the effect of internal temperature on electron-induced fragmentation o
bserved in mass spectra. The vibrational excitation depends on inciden
t translational energy, E(tr), and a maximum temperature increase of 5
0 K is reached in direct scattering at E(tr) = 2.5 eV. No effect of su
rface temperature has been observed at 950-1400 K. Inelastic angular d
istributions are reproduced by a collision complex model, and the expe
rimental results are related to existing models for vibrational excita
tion.