MATERIAL CHARACTERIZATION OF SPUTTERED SODIUM-ION CONDUCTIVE CERAMICSFOR A PROTOTYPE CO2 MICRO-SENSOR

Authors
LANG T CARON M IZQUIERDO R IVANOV D CURRIE JF YELON A
Citation
T. Lang et al., MATERIAL CHARACTERIZATION OF SPUTTERED SODIUM-ION CONDUCTIVE CERAMICSFOR A PROTOTYPE CO2 MICRO-SENSOR, Sensors and actuators. B, Chemical, 31(1-2), 1996, pp. 9-12
Citations number
9
Categorie Soggetti
Engineering, Eletrical & Electronic","Instument & Instrumentation
Journal title
Sensors and actuators. B, Chemical → ACNP
ISSN journal
09254005
Volume
31
Issue
1-2
Year of publication
1996
Pages
9 - 12
Database
ISI
SICI code
0925-4005(1996)31:1-2<9:MCOSSC>2.0.ZU;2-X
Abstract
RF magnetron sputtered Nasicon and sodium carbonate ionic conductive t hin films (2000 Angstrom) have been characterized using physical-chemi cal methods such as Auger electron spectroscopy (AES), X-ray photoelec tron spectroscopy (XPS), scanning electron microscopy (SEM) and electr ochemical impedance spectroscopy (EIS). It is found that the overall c hemical composition of sputtered and of laser deposited films is simil ar to that of the sputtering target. The Nasicon films show a sufficie ntly high ionic conductivity (0.36 S cm(-1) at 360 degrees C) for use in a prototype integrated CO2 sensor with the dimensions of 3 x 4 mm.