T. Brousse et Dm. Schleich, SPRAYED AND THERMALLY EVAPORATED SNO2 THIN-FILMS FOR ETHANOL SENSORS, Sensors and actuators. B, Chemical, 31(1-2), 1996, pp. 77-79
Tin dioxide thin films have been prepared by both spray pyrolysis and
thermal evaporation on alumina substrates. The main purpose was to det
ermine suitable microstructural and electrical properties for ethanol
sensors. Chlorine content in precursor solutions used in the spray pyr
olysis technique affects both the structural and the electrical proper
ties of the films. Chlorine-free precursors were prepared to achieve p
orous SnO2 films. Ethanol sensing properties were determined and compa
red to thermally evaporated films.