HIGHLY EFFICIENT WAVE-GUIDE-DETECTOR COUPLING STRUCTURES FOR INTEGRATED OPTOELECTRONIC CIRCUITS ON SILICON

The direct waveguide-detector coupling is a highly efficient way to tr ansform optical power guided in an integrated optical waveguide into e lectrical signals. This paper presents the design, technical realizati on, measuring setups, and results for waveguide endfire coupling struc tures to vertical and horizontal diodes on a silicon substrate. The de cisive components of the coupling structures as the step in the substr ate, the antireflective coating, the integrated optical striploaded wa veguide and different types of PIN-diodes will be discussed. The appli cations for such structures are demonstrated on an integrated optical pressure sensor and a fast optical detector for wavelength up to 1.1 m u m.