TiC layers have been successfully deposited locally on D2 tool steel s
pecimens and miniature industrial tools with the aim to improve their
mechanical and chemical surface properties. The deposition process was
based on a pyrolytically-induced chemical reaction of TiCl4 and CCl4
compounds combined with an atomic hydrogen source. Local heating of th
e substrate was achieved by means of a 100 W CO2 laser controlled by a
microcomputer-based feedback loop system, involving on-line substrate
temperature monitoring. Scanning electron microscopy, energy-dispersi
ve X-ray analysis, X-ray diffraction, and transmission electron micros
copy analysis showed that close-stoichiometric TiC (fcc structure, lat
tice constant a = 4.2 Angstrom) was deposited in the films with a nano
crystalline structure. The microhardness of the coatings was in the ra
nge 2500-3200 HK.