This paper addresses the defect structure, as observed by transmission
electron microscopy, at a CdTe(111)/GaAs(001) interface. When viewed
along the [1(1) over bar0$]CdTe direction, the overlayer exhibits a hi
gh density of microtwins parallel to the CdTe(111) growth direction. M
eanwhile, when viewed along [11(2) over bar]CdTe, an array of misfit d
islocations, exhibiting edge component of Burgers vector equal to a/4[
<(1)over bar 10>], a = 6.48 Angstrom, are observed at the interface be
tween the CdTe and GaAs lattices. These misfit dislocations are of suc
h a spacing as to be consistent with only partial relief of the misfit
strain. The residual misfit strain is found to relax in a region exte
nding about 200 Angstrom from the interface, with the source of the st
rain relief being layer dislocations in the CdTe overlayer. The distan
ce over which the misfit relaxes is consistent with the results of X-r
ay measurements of the misfit relaxation in thin overlayers. Furthermo
re, the distance over which the misfit relaxes is the same as that whi
ch the high density of microtwins are observed, suggesting that the mi
crotwins act as nucleation sites for the observed layer dislocations.