DEPOSITION STAGES AND APPLICATIONS OF CAE MULTICOMPONENT COATINGS

This paper concerns the main physical processes in cathodic are plasma deposition of multicomponent coatings by means of composite cathodes. The following processes are investigated: (1) surface cleaning by ion bombardment; (2) erosion of composite cathodes; (3) generation and ac celeration of multicomponent ion flows; and (4) coating growth. Also d iscussed are three applications of industrial technologies: heat-resis tant coatings (NiCrAlSiBY) for gas turbines, erosion-resistant coating s (Ti-Si-N) for compressor blades, and wear-resistant coatings ((Ti,Al )N, Al-Si-N) for cutting tools.