INVESTIGATION OF LATTICE-DISTORTIONS IN INP CRYSTALS IMPLANTED WITH FE-RESOLUTION X-RAY-DIFFRACTION AND X-RAY STANDING-WAVE METHODS( IONS BY MEANS OF HIGH)

Authors
BOCCHI C FRANZOSI P IMAMOV RM LOMOV AA MASLOV AV MUKHAMEDZHANOV EK YAKOVCHICK YV
Citation
C. Bocchi et al., INVESTIGATION OF LATTICE-DISTORTIONS IN INP CRYSTALS IMPLANTED WITH FE-RESOLUTION X-RAY-DIFFRACTION AND X-RAY STANDING-WAVE METHODS( IONS BY MEANS OF HIGH), Journal of applied physics, 76(11), 1994, pp. 7239-7245
Citations number
25
Categorie Soggetti
Physics, Applied
Journal title
Journal of applied physics → ACNP
ISSN journal
00218979
Volume
76
Issue
11
Year of publication
1994
Pages
7239 - 7245
Database
ISI
SICI code
0021-8979(1994)76:11<7239:IOLIIC>2.0.ZU;2-P
Abstract
Lattice distortions due the implantation of Fe+ ions in InP semi-insul ating crystals have been investigated by means of high-resolution x-ra y-diffraction and x-ray standing-wave methods. The effects of both the implantation dose and the annealing time were studied. It is shown th at the x-ray standing-wave method provides valuable complementary info rmation on strain and damage in the subsurface layer and permits one t o distinguish between different distortion profiles that give practica lly the same kinematical diffraction curve. (C) 1994 American Institut e of Physics.