Bj. Mrstik et al., RELATIONSHIP BETWEEN RADIATION RESPONSE AND DENSITY OF BURIED OXIDE IN SEPARATION-BY-IMPLANTATION-OF-OXYGEN MATERIAL, Applied physics letters, 65(23), 1994, pp. 2993-2995
We show that the radiation response of separation-by-implantation-of-o
xygen material is determined primarily by the density of the buried ox
ide. We also show that minor variations in process conditions can sign
ificantly affect the oxide density, although it is not yet clear which
process parameters are most important. (C) 1994 American Institute of
Physics.