RELATIONSHIP BETWEEN RADIATION RESPONSE AND DENSITY OF BURIED OXIDE IN SEPARATION-BY-IMPLANTATION-OF-OXYGEN MATERIAL

Authors
MRSTIK BJ MCMARR PJ LAWRENCE RK
Citation
Bj. Mrstik et al., RELATIONSHIP BETWEEN RADIATION RESPONSE AND DENSITY OF BURIED OXIDE IN SEPARATION-BY-IMPLANTATION-OF-OXYGEN MATERIAL, Applied physics letters, 65(23), 1994, pp. 2993-2995
Citations number
12
Categorie Soggetti
Physics, Applied
Journal title
Applied physics letters → ACNP
ISSN journal
00036951
Volume
65
Issue
23
Year of publication
1994
Pages
2993 - 2995
Database
ISI
SICI code
0003-6951(1994)65:23<2993:RBRRAD>2.0.ZU;2-#
Abstract
We show that the radiation response of separation-by-implantation-of-o xygen material is determined primarily by the density of the buried ox ide. We also show that minor variations in process conditions can sign ificantly affect the oxide density, although it is not yet clear which process parameters are most important. (C) 1994 American Institute of Physics.