F. Koyama et al., 2-DIMENSIONAL MULTIWAVELENGTH SURFACE-EMITTING LASER ARRAYS FABRICATED BY NONPLANAR MOCVD, Electronics Letters, 30(23), 1994, pp. 1947-1948
The authors demonstrate two dimensional multiwavelength vertical cavit
y surface emitting laser (VCSEL) arrays fabricated by using nonplanar
metal organic chemical vapour deposition (MOCVD). The resonance wavele
ngth of GaInAs/GaAs VCSELs grown on a patterned substrate is successfu
lly controlled in the wavelength range over 45nm on wafer. The thresho
ld of multiwavelength VCSELs formed on the patterned substrate is as l
ow as 3mA.