ADSORPTION MECHANISM AND KINETICS OF CHLORINE ON SI(100)-2X1 - A THEORETICAL-STUDY

Authors
CAO PL LEE LQ
Citation
Pl. Cao et Lq. Lee, ADSORPTION MECHANISM AND KINETICS OF CHLORINE ON SI(100)-2X1 - A THEORETICAL-STUDY, Physical review. B, Condensed matter, 50(19), 1994, pp. 14624-14626
Citations number
16
Categorie Soggetti
Physics, Condensed Matter
Journal title
Physical review. B, Condensed matter → ACNP
ISSN journal
01631829
Volume
50
Issue
19
Year of publication
1994
Pages
14624 - 14626
Database
ISI
SICI code
0163-1829(1994)50:19<14624:AMAKOC>2.0.ZU;2-R
Abstract
The characterization and interaction between C1 atoms on the Si(100)-2 X1 surface have been studied by atom superposition and electron-deloca lization molecular-orbital theory, using a 2X1 symmetric-dimer model f or this surface. A model to explain the slowing of chlorine adsorption kinetics at a coverage of about 0.7 C1/Si is proposed.