Ey. Lee et al., DIRECT MAPPING OF THE COSI2 SI(111) INTERFACE BY BALLISTIC-ELECTRON-EMISSION MICROSCOPY AND MODULATION SPECTROSCOPY/, Physical review. B, Condensed matter, 50(19), 1994, pp. 14714-14717
To map the interfacial structure of CoSi2/Si(111), the atomic thicknes
s variations of epitaxial CoSi2 films were spatially resolved and dete
rmined using ballistic-electron-emission microscopy. Modulation spectr
oscopy was also used, and it showed not only thickness variations, but
also strong lateral variations near the interfacial steps and disloca
tions. Also, a strong energy dependence of the quantum-size effects du
e to the transition from bound quantized subbands to resonances in CoS
i2 was seen.