Jg. Han et al., HIGH-TEMPERATURE WEAR-RESISTANCE OF (TIAL)N FILMS SYNTHESIZED BY CATHODIC ARC PLASMA DEPOSITION, Surface & coatings technology, 87-8(1-3), 1996, pp. 82-87
(TiAl)N films were deposited on M2 high speed steel by cathodic are pl
asma deposition process employing two separate targets of Al and Ti, a
nd the formation behavior of the film was investigated by Auger electr
on spectroscopy (AES), X-ray diffraction (XRD), energy dispersive spec
troscopy (EDS) and scanning electron microscopy (SEM). The composition
of (TiAl)N films was varied by controlling the cathode current ratio
(I-Al/I-Ti) of Al and Ti targets at constant are voltage. As the ratio
I-Al/I-Ti increased from 0.31 to 0.73, the Al/Ti atomic ratio linearl
y increased from 0.49 to 1.29. The hardness of (TiAl)N reached 3000 kg
mm(-2) at the Al/Ti atomic ratio of 1.10. The high temperature wear r
esistance of (TiAl)N films was consequently enhanced up to 600 degrees
C. A significant improvement of the high temperature wear resistance
could be obtained below the temperature of 500 degrees C. The wear mec
hanisms were discussed and correlated with changes in dynamic friction
coefficient and microstructural wear track analysis.