HEAT-GENERATION IN MULTILAYER PIEZOELECTRIC ACTUATORS

Multilayer piezoelectric actuators when driven under high frequency, g enerate significant heat, which influences the reliability and other p iezoelectric properties, In this paper, heat generation in various typ es of multilayer PZT-based actuators was studied, Experimental results showed that heat generation is mainly caused by ferroelectric hystere sis loss in the stress-free state, A simplified analytic method was es tablished to evaluate the temperature rise, which is useful for the de sign of multilayer and other high-power actuators.