AN ELECTRON-MICROSCOPE STUDY OF NEAR-SURFACE DAMAGE CAUSED BY XE AND NE ION-IMPLANTATION IN CUINSE2 SINGLE-CRYSTALS

Authors
ZEGADI A BELATTAR A FAUNCE CA AHMED E ANWAR S YAKUSHEV MV IMANIEH M SLIFKIN MA HILL AE TOMLINSON RD
Citation
A. Zegadi et al., AN ELECTRON-MICROSCOPE STUDY OF NEAR-SURFACE DAMAGE CAUSED BY XE AND NE ION-IMPLANTATION IN CUINSE2 SINGLE-CRYSTALS, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 94(4), 1994, pp. 429-432
Citations number
16
Categorie Soggetti
Physics, Nuclear","Nuclear Sciences & Tecnology","Instument & Instrumentation
Journal title
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms → ACNP
ISSN journal
0168583X
Volume
94
Issue
4
Year of publication
1994
Pages
429 - 432
Database
ISI
SICI code
0168-583X(1994)94:4<429:AESOND>2.0.ZU;2-K
Abstract
In this paper, we present the first SEM comparative study of the damag e induced on the near-surface of CuInSe2 single crystals following imp lantation with ions of neon and xenon. We show that whilst neon ions h ave hardly affected the appearance of the CuInSe2 surface, xenon ions have led to preferential sputtering and to the formation of gas bubble s trapped near to the surface. After reaching their saturation levels these bubbles have led to gas release. The experimental results are co rrelated with TRIM calculations.